Toyota CRDL And Denso Corp. have utilized for patents related to the topic of the Letter. Commercialization from the patents might lead to economic Rewards towards the authors. CMP of single-crystal SiC was initially reported by Zhou [22] in 1997. He found that chemical reactions of CMP might be enhanced https://www.quora.com/profile/Trevor-Flatcher-2/Application-and-Development-of-Silicon-Carbide-in-Bulletproof-Ceramics-Silicon-Carbide-in-Bulletproof-Ceramics-Applica